ELECTRODE SHEET FOR ELECTROSTATIC CHUCK APPARATUS, ELECTROSTATIC CHUCK APPARATUS, AND ABSORBING METHOD TO AVOID INFLUENCE OF ACCIDENT IN ELECTRODE PATTERN OR MIXED PARTICLES AND AIR BUBBLES OF ELECTRODE PATTERN

摘要

PURPOSE: An electrode sheet for an electrostatic chuck apparatus is provided to avoid the influence of an accident in an electrode pattern or mixed particles and air bubbles of the electrode pattern by forming the first and second electrode layers at both sides of an insulation layer and by applying a voltage to both electrodes to generate a potential difference between both electrodes. CONSTITUTION: An insulation layer(1) is made of an insulation material. The first and second electrode layers(2,3) are formed on both surfaces of the insulation layer at both sides of the insulation layer to generate a potential difference. The surface of two electrode layers is coated with an insulating thin film(4,5).