摘要 |
PROBLEM TO BE SOLVED: To provide a probe used in a scanning tunneling microscope with an extremely sharp tip and high strength and its manufacturing method. SOLUTION: In the probe 10 of the scanning tunneling microscope and its manufacturing method, the probe 10 is formed from metal such as tungsten, a tip surface 12 of the probe 10 has a buffer layer such as a carbonization coating film, and a carbon nanotube 13 is extended from the buffer layer such as the carbonization coating film of the tip surface 12 of the probe 10. COPYRIGHT: (C)2005,JPO&NCIPI
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