| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying device 100 in which a position of a robot hand 10 can be precisely corrected by allowing a camera coordinate system Sc which is recognized by a CCD camera 60 and a robot coordinate system Sr of a conveyance robot 10 to correspond to each other.SOLUTION: A substrate conveying device includes a target T provided in a robot hand 20, a CCD camera 60 provided in a load lock chamber 41 to recognize the target T, and a controller 50 for controlling a turning amount or a shrinking amount of a robot arm 30. The controller 50 gives, to the robot arm 30, a command value for turning or shrinking the robot arm 30 by a given value, and determines the camera coordinate system Sc of the CCD camera 60 so as to correspond to the robot coordinate system Sr of the robot hand 20 based on a relationship between the command value given to the robot arm 30 and a movement amount of the target T recognized by the CCD camera 60. |
