| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing carbon nanotubes where the carbon nanotubes excellent in mass-productivity and reproducibility can be produced with high temperature rising speed and high growing speed by local heating. SOLUTION: In a carbon nanotube forming step to form the carbon nanotubes on a substrate 2 by supplying a carbon raw material gas while heating the substrate 2 under reduced pressure, the substrate 2 is locally heated with infrared rays. The apparatus for producing the carbon nanotubes comprises a chamber 1 to house the substrate 2 for forming the carbon nanotubes, a gas introducing means 3 to introduce the carbon raw material gas into the chamber 1, an exhausting means 4 to exhaust a gas from the chamber 1, a substrate holding means 5 to hold the substrate 2 and a substrate heating means 6 to heat the substrate 2. The substrate heating means 6 is constituted to be an infrared ray heating device. COPYRIGHT: (C)2008,JPO&INPIT |
