发明名称 SPIRAL INDUCTOR HAVING PARALLEL-BRANCH STRUCTURE
摘要 A spiral inductor having a lower metal line and an upper metal line with an insulating layer interposed therebetween is provided. In the spiral inductor, the lower and upper metal lines are connected to each other through a via contact passing through the insulating layer. The upper metal line spirally turns inward from the periphery to the center, and the lower metal line includes a first lower metal line crossing the upper metal line and disposed to be parallel with another adjacent first lower metal line, and a second lower metal line disposed to be parallel with the upper metal line.
申请公布号 EP1419531(A4) 申请公布日期 2008.04.16
申请号 EP20010274455 申请日期 2001.12.26
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 SUH, DONG-WOO;MHEEN, BONG-KI;KANG, JIN-YEONG
分类号 H01L21/822;H01F17/00;H01F27/28;H01F27/34;H01L27/04 主分类号 H01L21/822
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