发明名称 SOFT MEMS
摘要 <p>A microscale polymer-based apparatus comprises a substrate formed from a first polymer material and at least one active region integrated with the substrate. The at least one active region is patterned from a second polymer material that is modified to perform at least one function within the at least one active region.</p>
申请公布号 EP2029300(A2) 申请公布日期 2009.03.04
申请号 EP20070852379 申请日期 2007.06.01
申请人 THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS 发明人 LIU, CHANG;ENGEL, JONATHAN;RYU, KEE
分类号 B32B7/02;B01L3/00;B81C99/00 主分类号 B32B7/02
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