CHARACTERIZATION OF DIELECTRIC MATERIALS

摘要

A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material.

主权项

1. A method for evaluating a dielectric material comprising:
providing a dielectric material including a first major surface, a second major surface, and a thickness therebetween; providing a first electrode adjacent the first major and a second electrode adjacent the second major surface; applying an excitation signal to at least one of the first and second electrodes to generate an electric field across the dielectric material; measuring the electrical signature of the dielectric material by sampling the current or voltage from at least one of the first and second electrodes; and comparing the measured electrical signature against an expected electrical signature to evaluate, based on the comparison, a property of the dielectric material.