| 摘要 |
The purpose of the present invention is to provide an electrostatic chuck device that can be used even in high-temperature environment, said electrostatic chuck device having a high heat resistance. An electrostatic chuck device (1) is provided with: an electrostatic chuck section (2), which has a placing surface (19) having a board-like sample W placed on one main surface, and which is provided with an electrostatic attraction electrode (13); a temperature adjustment base section (3), which is disposed on the opposite side to the placing surface (19) with respect to the electrostatic chuck section (2), and which cools the electrostatic chuck section (2); a heater element (5) disposed in a layer-shape between the electrostatic chuck section (2) and the temperature adjustment base section (3); and a first bonding layer (4a), which is provided between the heater element (5) and the electrostatic chuck section (2), and which bonds the heater element (5) and the electrostatic chuck section (2) to each other. The first bonding layer (4a) is formed of an inorganic glass or an inorganic material having a partially crystallized glass structure. |
