| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination optical system that allows illumination to be quickly implemented by two rays of light of an optimal angle so as to meet a numerical aperture of an objective lens or other conditions when implementing asymmetric lattice illumination.SOLUTION: An illumination optical system, which illuminates an object face, includes: split means that splits a light flux from a light source into a first light flux and second light flux; optical means that makes the first and second light fluxes incident upon a conjugate face as a parallel light flux; first adjustment means that can adjust a first angle of incidence of the first light flux with respect to the conjugate face; and second adjustment means that can adjust a second angle of incidence of the second light flux with respect to the conjugate face. The optical means is configured to form the first and second adjustment means onto the conjugate face.SELECTED DRAWING: Figure 2 |
