| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate cleaning device and a substrate cleaning method capable of removing adhesion substance from the side face of a substrate and to clean the same.SOLUTION: The substrate cleaning device according to an embodiment includes plural rollers for holding and rotating a substrate. The substrate cleaning device also includes one or more cleaning members provided to one or more rollers in the plural rollers. The plural rollers hold the substrate so that the side face of the substrate comes into contact with the cleaning member.SELECTED DRAWING: Figure 1 |
