发明名称 APPARATUS AND METHOD FOR MEASURING CHARACTERISTICS OF RADIO FREQUENCY ENERGY
摘要 PROBLEM TO BE SOLVED: To realize a method and apparatus for measuring the characteristics of radio frequency energy in an industrial radio frequency processing system at a plurality of frequencies, using one detector. SOLUTION: This apparatus comprises a plurality of generators for generating a plurality of power outputs onto a single transmission line at a plurality of frequencies; and a common detector for detecting the associated characteristics of the plurality of outputs, sensing the associated characteristics of a first generated output at a first frequency, alternating to a second frequency, and sensing the associated characteristics of the second generated output at the second frequency.
申请公布号 JP2001326218(A) 申请公布日期 2001.11.22
申请号 JP20010024350 申请日期 2001.01.31
申请人 ENI TECHNOLOGY INC 发明人 KEANE ANTHONY R A;VONA DANIEL F JR
分类号 H05H1/46;G01R23/00;H01J37/32;H01L21/302;H01L21/3065 主分类号 H05H1/46
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