| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a work holding device, which is small-sized, whose control is simplified, whose sealing part has a simple structure, and whose seal is free from being worn out, and to provide a laser beam machining apparatus using the same device. <P>SOLUTION: A work holding device 1 is provided with a chuck 5 for holding a work 9 and a chuck driving part for driving the chuck, and performs laser beam machining of the work by biaxially operating the chuck. The chuck driving part consists of a 1st motor 21 fixed to a base 2 and a 2nd motor 31 fixed to a 1st-motor moving part 25, and the chuck is fixed to a 2nd-motor moving part 35. An elastic seal 6 and a protective plate 4, which holds the seal, are provided around the chuck. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
