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发明名称
KORPUSKULAROPTISCHES GERÄT MIT EINER TEILCHENQUELLE UMSCHALTBAR ZWISCHEN HOHER HELLIGKEIT UND GROSSEM STRAHLSTROM
摘要
申请公布号
DE60033767(D1)
申请公布日期
2007.04.19
申请号
DE20006033767
申请日期
2000.06.15
申请人
FEI CO.
发明人
TIEMEIJER, PETER C.
分类号
H01J37/063;H01J37/073;G01Q30/02;H01J37/09;H01J37/12
主分类号
H01J37/063
代理机构
代理人
主权项
地址
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