| 摘要 |
PROBLEM TO BE SOLVED: To provide a reliable manufacturing method of a quartz oscillator having extremely high production efficiency, and to provide the quartz oscillator. SOLUTION: In the quartz oscillator, a first insulating film is formed on a first substrate of resin, respective quartz oscillation elements placed on a base substrate, where a metal pattern is formed on the first insulating film, are sealed collectively, and a second insulation film is formed on a second substrate having a plurality of recesses made of resin similarly. In the quartz oscillator, anodic bonding is made to the insulation film on each upper edge opening sealing surface of the second substrate at a metal pattern section formed on the base substrate. In the quartz oscillator, the first insulation film and/or the second one is made of one of Si, SiO<SB>2</SB>, and glass. The problem is solved by using the manufacturing method of the quartz oscillator. COPYRIGHT: (C)2008,JPO&INPIT
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