| 摘要 |
PROBLEM TO BE SOLVED: To provide a superconducting element not allowing deterioration in the Josephson junction even when a superconductor thin film is formed of a multilayer structure, and also to provide a manufacturing method of the same superconducting element. SOLUTION: The superconducting element includes a substrate 2; a first superconductor pattern 3a formed on the substrate 2; an insulating pattern 5a formed on the first superconductor pattern 3a; and a second superconductor pattern 8a formed on the upper-most layer of a multilayer superconductor pattern, where a barrier layer 8b of the Josephson junction is formed at the lower surface or within a film, and a circuit element is formed on the insulating pattern 5a. COPYRIGHT: (C)2008,JPO&INPIT
|
