发明名称 |
PIEZOELECTRIC MICROCANTILEVERS AND USES IN ATOMIC FORCE MICROSCOPY |
摘要 |
The invention is direct to a piezoelectric microcantilever for static contact and dynamic noncontact atomic force microscopy which may be carried out in solution. The piezoelectric microcantilever, which includes a piezoelectric layer and a non-piezoelectric layer is capable of self actuation and detection. The piezoelectric layer may be constructed from a lead magnesium niobate-lead titanate (Pb(Mg1/3Nb2/3)O3)0.65-(PbTiO3)0.35(PMN0.65-PT0.35)(PMN-PT), zirconate titanate (PZT)/SiO2 or from any lead-free piezoelectric materials such as doped sodium-potassium niobate-lithium niobate. The piezoelectric layers of the microcantilevers may have dielectric constants of from 1600-3000 and thicknesses below 10 mum. Also disclosed are methods for fabricating microcantilever sensors and methods for atomic force microscopy employing the microcantilevers.
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申请公布号 |
US2009007645(A1) |
申请公布日期 |
2009.01.08 |
申请号 |
US20070946534 |
申请日期 |
2007.11.28 |
申请人 |
DREXEL UNIVERSITY |
发明人 |
SHIH WAN Y.;SHIH WEI-HENG;SHEN ZUYAN;ZHU QING |
分类号 |
G01Q20/04;G01Q60/38;H01L41/22 |
主分类号 |
G01Q20/04 |
代理机构 |
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