| 摘要 |
PURPOSE: A door opening/closing device of a chamber is provided to reduce the occupied area of a door within a chamber by arranging a door to overlap the front part and the rear part of the door. CONSTITUTION: A door(10) is located on the front side of the chamber. The door is composed of doors(12,14) opening the inlet of the chamber. The fixed rail part is formed on the movement orbit of the doors. The movable rail part moves towards the inside or the outside of the chamber. A slide part moves the movable rail part to a left side and a right side along the orbit. A horizontal cylinder part(50) is connected to the slide part. The horizontal cylinder part transfers the slide part to the left side or the right side.
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