发明名称 塩、レジスト組成物及びレジストパターンの製造方法
摘要 The present invention provides a salt represented by the formula (I): wherein Q1 and Q2 independently each represent a fluorine atom or a C1-C6 perfluoroalkyl group, L1 and L2 independently each represent a C1-C17 divalent saturated hydrocarbon group in which one or more -CH2- can be replaced by -O- or -CO-, ring W1 and ring W2 independently each represent a C3-C36 aliphatic ring, R2 is independently in each occurrence a C1-C6 alkyl group, R4 is independently in each occurrence a C1-C6 alkyl group, R3 represents a C1-C12 hydrocarbon group, t represents an integer of 0 to 2, u represents an integer of 0 to 2, and Z+ represents an organic counter ion.
申请公布号 JP5953670(B2) 申请公布日期 2016.07.20
申请号 JP20110169947 申请日期 2011.08.03
申请人 住友化学株式会社 发明人 吉田 勲;市川 幸司
分类号 G03F7/004;C07C309/17;C07C381/12;C08K5/36;C09K3/00;G03F7/039 主分类号 G03F7/004
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