发明名称 半導体装置の製造方法
摘要 A method for manufacturing a semiconductor device including a semiconductor chip having a front surface electrode and a rear surface electrode provided on a front surface and a rear surface, respectively, the method includes a front surface electrode layer forming step of forming a front surface electrode layer as the front surface electrode on a front surface of a semiconductor wafer forming the semiconductor chip; a thinning step of grinding a rear surface of the semiconductor wafer to reduce a thickness of the semiconductor wafer after the front surface electrode layer forming step; a plating step of forming an electrode plating film as the front surface electrode on a surface of the front surface electrode layer after the thinning step; and a rear surface electrode forming step of forming the rear surface electrode on the ground rear surface of the semiconductor wafer after the plating step.
申请公布号 JP5983889(B2) 申请公布日期 2016.09.06
申请号 JP20150538998 申请日期 2014.07.31
申请人 富士電機株式会社 发明人 浦野 裕一
分类号 H01L21/288;C23C18/42;C23C18/50;H01L21/28 主分类号 H01L21/288
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