| 发明名称 |
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD |
| 摘要 |
Provided is an imprint apparatus that brings a mold into contact with an imprint material on a substrate to perform patterning on the substrate, and includes a mold holder configured to hold the mold; a substrate holder configured to hold the substrate; a driving device configured to move at least one of the mold holder and the substrate holder; a detector configured to detect a state of the driving device; and a controller configured to perform decision that release of the mold is started based on an output of the detector and to control the driving device so as to decrease a force for the release by the driving device in accordance with the decision. |
| 申请公布号 |
US2016257060(A1) |
申请公布日期 |
2016.09.08 |
| 申请号 |
US201615049649 |
申请日期 |
2016.02.22 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Ito Hirohito;Asano Tosiya |
| 分类号 |
B29C59/00;B29C59/02 |
主分类号 |
B29C59/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An imprint apparatus that brings a mold into contact with an imprint material on a substrate to perform patterning on the substrate, the imprint apparatus comprising:
a mold holder configured to hold the mold; a substrate holder configured to hold the substrate; a driving device configured to move at least one of the mold holder and the substrate holder; a detector configured to detect a state of the driving device; and a controller configured to perform decision that release of the mold is started based on an output of the detector and to control the driving device so as to decrease a force for the release by the driving device in accordance with the decision. |
| 地址 |
Tokyo JP |
