| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for correcting the movable head position of an X-Y substrate inspection device for correcting positional displacement by calculating an inclination on an X-Y plane of a Y-axis drive unit in X-Y substrate inspection devices that use a ball screw and a linear guide as the drive mechanism of a movable head, and also to provide and an X-Y substrate inspection device.SOLUTION: When reference mark sequences 22 and 23 with known coordinate positions are installed at both sides of the X axis direction, and a Y-axis drive unit 14 having a movable head 17 mounted thereon is moved to a target position in the X axis direction, a reference mark of the reference mark sequence 22 at one side is taken in with a camera 19 of the movable head 17 to calculate a distance between the position after movement and the reference mark. The Y-axis drive unit 14 is driven, a distance between the position after movement and a reference mark of the reference mark sequence 23 at the other side is calculated, and the inclination α of the Y-axis drive unit 14 is calculated from the calculated distance.SELECTED DRAWING: Figure 3 |
