| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat proof substrate having a construction coated with a thermal decomposition boron nitride film high in a corrosion resistance.SOLUTION: A heat proof substrate has a construction, in which a substrate surface is partially or wholly coated with a thermal decomposition boron nitride film, and the thermal decomposition boron nitride film contains oxygen in 0.001 atom% or more and 3 atom% or less. The thermal decomposition boron nitride film containing oxygen can be manufactured by the CVD method by adding a gas containing oxygen atoms in addition to a gas containing nitrogen atoms and a gas containing boron atoms.SELECTED DRAWING: Figure 1 |
