| 摘要 |
PROBLEM TO BE SOLVED: To provide a cup structure which can be easily and accurately replaced and has a high level of freedom in shape and arrangement choice.SOLUTION: A liquid treatment apparatus (1) comprises: a substrate holder (2) that horizontally holds a substrate (W) and rotates it around a vertical axis; a treatment liquid feeder (7) that feeds treatment liquid to the substrate (W); an outer cup (5) that covers the circumference of the substrate (W); a first inner cup constituent member (30) having a projection (31) so disposed on the rear side of the substrate (W) that its tip protrudes toward the rear side of the substrate (W); and a second inner cup constituent member (40) formed on the outer circumference side of the first inner cup constituent member (30) as a separate element from the first inner cup constituent member (30) and having an inclined face (41) inclining from the lower periphery of the substrate (W) toward its outside. |
