| 摘要 |
FIELD: measurement equipment.SUBSTANCE: in pressure measuring method using a resistive strain-gauge pressure sensor based on a nano- and microelectromechanical system (NiMEMS), in the measurement mode, the measured pressure value Pis calculated by means of biharmonic spline interpolation as per control points, based on column vector W(P, U, U, X?X) saved at calibration stage by the following formula: P=G×W, where G- transposed column vector G; symbol "×" means matrix product. Calibration for pressure measurement is performed by recording of stresses of measurement Uand feed Udiagonals of a bridge measurement chain and values X?X, depending on destabilising factors, and by writing to a read-only memory of the sensor of column vector W, which is calculated as per the following formula: W=g×P, where P - column vector of reference values of pressure at control points; g - matrix, the elements of which are defined depending on the number of variables of conversion function. Pressure sensor based on NiMEMS, which implements the proposed measurement and calibration methods, includes a current sensor, a resistive strain-gauge pressure converter, ADC, a calculating device, a read-only memory and a digital interface. With that, the calculation device consists of a conversion unit of ADC code to a numerical voltage value, and a calculation unit of numerical pressure value.EFFECT: improvement of pressure measurement accuracy.3 cl, 4 dwg, 4 tbl |
