ELECTRONIC DEVICE, MANUFACTURING METHOD OF THE SAME, ELECTRONIC APPARATUS AND MOVABLE BODY,申请号JP20130028186-传众专利搜索

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发明名称	ELECTRONIC DEVICE, MANUFACTURING METHOD OF THE SAME, ELECTRONIC APPARATUS AND MOVABLE BODY
摘要	PROBLEM TO BE SOLVED: To provide an electronic device or the like having improved reliability.SOLUTION: An electronic device includes: a substrate; a lid body mounted on the substrate; a first functional element provided in a first cavity surrounded by the substrate and the lid body; and a second functional element provided in a second cavity surrounded by the substrate and the lid body. An inside of the first cavity is sealed with a first pressure atmosphere, and an inside of the second cavity is sealed with a second pressure atmosphere having a pressure difference from the first pressure atmosphere. A first through hole that communicates with the first cavity and is closed by a sealing member is provided on at least one of the substrate and the lid body. The first cavity and the second cavity are separated from each other by a partition wall integrally provided to the lid body or the substrate.
申请公布号	JP2013232626(A)	申请公布日期	2013.11.14
申请号	JP20130028186	申请日期	2013.02.15
申请人	SEIKO EPSON CORP	发明人	TAKIZAWA TERUO
分类号	H01L23/02	主分类号	H01L23/02
代理机构		代理人
主权项
地址

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