发明名称 TEST DEVICE AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE: A test apparatus and a semiconductor integrated circuit are provided to improve productivity of static memory by accurately measuring the shortage by the active area and applying the result to the static memory cell area. CONSTITUTION: A semiconductor substrate comprises a first test area and a second test area. First conductive active areas are formed separate from each other by an element isolation area. Second conductive active areas are formed separate from the first conductive active areas. A first gate line is formed on the semiconductor substrate, with one end close to the second conductive active areas. A first shared contact is extended from one end of the first gate line to above the second conductive active areas. The first node is electrically connected on the first shared contact. First conductive test active areas(210) are formed corresponding to the first conductive active areas. A second gate line(234) is formed corresponding to the first gate line. A second shared contact is formed in the second gate line and a part of an element isolation region(202), corresponding to the first shared contact. A second node(274) is electrically connected to the second shared contact.
申请公布号 KR20100008918(A) 申请公布日期 2010.01.27
申请号 KR20080069544 申请日期 2008.07.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, SANG JIN;LEE, GIN KYU
分类号 H01L21/66 主分类号 H01L21/66
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