发明名称 液晶ガラスのエッチング装置に用いる薬液の更新方法、薬液更新用ノズル及び更新用薬液
摘要 To promote the renewing of a chemical solution used for a device for etching liquid crystal glass, in order to maintain an optimum environment when etching liquid crystal glass, and thereby make it possible to obtain a high-quality liquid crystal glass component. A method for renewing a chemical solution used for a device for etching liquid crystal glass, wherein a chemical solution discharge nozzle and a suction nozzle are disposed in an etching solution tank for containing the chemical solution, the chemical solution is discharged and suctioned in a state in which the nozzles are immersed in the chemical solution, the discharging and the suctioning using the above nozzles are performed simultaneously, and a uniform stress is applied to the chemical solution, whereby the renewing of the chemical solution is promoted.
申请公布号 JP5986223(B2) 申请公布日期 2016.09.06
申请号 JP20140551770 申请日期 2012.12.11
申请人 株式会社トーア電子 发明人 木内 丈司
分类号 C03C15/00 主分类号 C03C15/00
代理机构 代理人
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