OPTICAL SCANNER

摘要

The purpose of the present invention is to provide an optical scanner that allows the reflection within a scanning range from a region outside a mirror to be suitably reduced. A MEMS mirror (100) according to the present invention scans the light reflected from a mirror part (3) within a prescribed angle range by causing the mirror part (3) that reflects light incident thereon to pivot. The MEMS mirror includes a fixed frame (1), a frame part (2), and a protrusion pattern (7). The frame part (2) is coupled to the mirror part (3) and causes the mirror part (3) to pivot. The fixed frame (1) movably supports the frame part (2). The protrusion pattern (7) is provided on the surfaces of the fixed frame (1) and the frame part (2) at which incident light enters, reflects the incident light, and creates first order diffracted light caused by the reflection outside of the range of scanning angle.