ROLL-TO-ROLL GRAPHENE MANUFACTURING APPARATUS AND MANUFACTURING APPARATUS FOR SUPPLYING SUBSTRATES IN ROLL-TO-ROLL MANNER

摘要

The present invention relates to a roll-to-roll graphene manufacturing apparatus and a manufacturing apparatus for supplying substrates in a roll-to-roll manner. According to one aspect of the present invention, disclosed is a roll-to-roll graphene manufacturing apparatus comprising: a main chamber formed to be sealed from the outside and having at least one transparent window; a supply chamber, which is provided at one side of the main chamber and has a supply roll accommodated therein and supplying a catalyst substrate for graphene synthesis into the main chamber; a collection chamber, which is provided at the other side of the main chamber and has a collection roll accommodated therein and collecting the catalyst substrate having passed through the inside of the main chamber; a near-infrared heating module, which is provided at the outer side of the transparent window of the main chamber and irradiates the catalyst substrate, which passes through the inside of the main chamber, with near-infrared rays through the transparent window so as to heat the same; and a reaction gas supply valve for supplying a reaction gas into the main chamber.