SEMICONDUCTOR INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor inspection device which can correctly calculate the inspection finish time and reduce the stand-by time occurring at the time of conveyance and collection of a FOUP.SOLUTION: A semiconductor inspection device 104 gives advance notice of the inspection finish time of a FOUP 103 to a higher order HOST 107 when calculation of the inspection finish time of the FOUP is completed, gives the advance notice to each FOUP 103 held by all load ports 105, and finally sums the processing time of each FOUP 103 held by all the load ports 105 to give advance notice of the processing finish time of the whole semiconductor inspection device.SELECTED DRAWING: Figure 1