发明名称 |
METHOD FOR SYNTHESIZING CORE-SHELL TYPE HYPERBRANCHED POLYMER |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for synthesizing a core shell type hyperbranched polymer improved in surface flatness and alkali-soluble properties and usable as a polymer material for nanofabrication such as photolithography. <P>SOLUTION: A radical polymerization is performed in a reaction system in which a monomer, an initiator for initiating a radical polymerization and a radical scavenger for controlling a progress of the radical polymerization in synthesizing the core shell type hyperbranched polymer through the radical polymerization of the monomer. <P>COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008163244(A) |
申请公布日期 |
2008.07.17 |
申请号 |
JP20060355878 |
申请日期 |
2006.12.28 |
申请人 |
LION CORP |
发明人 |
SATO MASAHIRO;KABASHIMA SHINICHIRO;SHIMIZU YOSHIO;HORIBE MINEKO;UNO AKINORI |
分类号 |
C08F291/00;G03F7/039;H01L21/027 |
主分类号 |
C08F291/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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