BOLOMETRIC INFRARED SENSOR OF CANTILEVER TYPE SENSING BOTH RESISTIVE AND CAPACITIVE CHANGES AND THEREOF

摘要

A bolometer structure of cantilever type capable of improving SNR(Signal to Noise Ratio) and manufacturing method thereof are provided to measure change of resistor and capacitor at once by forming bolometer of resistive type and bolometer of capacitive type in a body. A silicone substrate(100) includes an electronic circuit part. A reflector electrode(200) is formed on the silicone substrate, and performs reflector function to absorb a resonance of infrared ray and function to read a changed capacitor value at the same time. At least one or more aluminum post is installed in one side of a signal bridge(400). The signal bridge is connected to the aluminum post, and provides thermally isolated structure. A resistance of resistor(500) is changed when temperature change is occurred by infrared ray.