| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid crystal display device provided with a thin film transistor with excellent electrical characteristics and reduced off current, for which an increase in manufacturing cost can be suppressed while suppressing reduction in yield. SOLUTION: A thin film transistor includes a gate electrode provided on a substrate, a gate insulating film provided to cover the substrate and the gate electrode, a first island-shaped semiconductor film and a second island-shaped semiconductor film each formed as a stack of a microcrystalline semiconductor film and a buffer layer with a depression on an upper surface thereof, on the gate electrode with the gate insulating film interposed therebetween, a conductive semiconductor film, and a conductive film provided on the conductive semiconductor film. The conductive semiconductor film is provided between the first island-shaped semiconductor film and the second island-shaped semiconductor film in contact with the gate insulating film. COPYRIGHT: (C)2009,JPO&INPIT |
