System for Detecting a Gas and Method Therefor

摘要

An apparatus and method for detecting a gas with high sensitivity, high SNR, and low cost is disclosed. Embodiments of the present invention include sensor nodes that communicate with a common controller, where each sensor node includes a resonant sensor that comprises a resonator having a selectively chemisorptive layer disposed upon it. The chemisorptive layer is a nanoparticle-based layer that improves the trapping probability for target-gas molecules, thereby improving the correspondence of the resonance frequency of the resonator to the gas concentration in the atmosphere in which it resides, and improving the sensitivity of the resonant sensor as compared to prior-art resonant mass sensors. Measurement of an electrical parameter of the chemisorption layer can also be used as a secondary detection mode. By employing the chemisorptive layer as an efficient and selective mass-collection layer affords embodiments of the present invention improved noise immunity.

主权项

1. An apparatus comprising a first sensor that includes:
a first resonator; and a first layer disposed on the first resonator, the first layer comprising a plurality of nanoparticles that collectively enable selective chemisorption of a first gas; wherein a first resonance frequency of the first resonator is based on the mass of the first layer; and wherein the first sensor is operative for providing a first signal that is indicative of a first concentration of the first gas at a first location.