发明名称 樹脂、レジスト組成物及びレジストパターンの製造方法
摘要 The present invention provides a resin comprising a structural unit derived from a compound represented by the formula (I): wherein R1 represents a hydrogen atom or a methyl group, A2 represents a divalent fluorine-containing C1-C12 hydrocarbon group, and A1 represents a group represented by the formula (a-g1): A10-X10sA11-  (a-g1) wherein A10 is independently in each occurrence a C1-C5 aliphatic hydrocarbon group, A11 represents a C1-C5 aliphatic hydrocarbon group, X10 is independently in each occurrence —O—, —CO—, —CO—O— or —O—CO—, and s represents an integer of 0 to 2, and a photoresist composition comprising the resin and an acid generator.
申请公布号 JP5985865(B2) 申请公布日期 2016.09.06
申请号 JP20120094365 申请日期 2012.04.18
申请人 住友化学株式会社 发明人 増山 達郎;市川 幸司
分类号 C08F20/26;G03F7/039;H01L21/027 主分类号 C08F20/26
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