| 摘要 |
PROBLEM TO BE SOLVED: To provide a board inspection method capable of improving reliability in measurement data by compensating distortion of measurement data according to posture of a board in that a measurement target is formed.SOLUTION: A method for inspecting a board in that a measurement target is formed is provided. A board inspection method measures a board in that a measurement target is formed, generates a plane equation of the board, and obtains an area of the measurement target formed on the board. After that, considering height of the measurement target, the area of the measurement target is converted to a board surface by the plane equation. Then, the measurement target is inspected based on the area of the measurement target converted to the board surface by the plane equation and the area of the measurement target by reference data. In this manner, an offset value of the measurement target is obtained according to a tilted posture of the board in that the measurement target is formed, and distortion of the measurement data is compensated by the offset value, thus improving reliability in the measurement data.SELECTED DRAWING: Figure 2 |
