发明名称 Interferometric angle measuring device
摘要 The angle measuring device has a laser (1), an interferometer module (2) with a beam splitter (3) and optical elements for providing parallel partial beams (14,15). A rotatable element (11) with a refraction grating (12) provides an optical path difference dependent on the angular position. The diffraction grating has equidistant line structures parallel to a diagonal of the rotatable element, with the grating plane perpendicular to the central rotation axis (10). The transmitted light is reflected by a rear surface (18) at an angle to this axis. The lattice constant of the grating is dimensioned so that the angle of deflection of the first or higher diffraction order of the partial beams corresponds to the slope of the rear surface.
申请公布号 DE19714602(A1) 申请公布日期 1998.10.15
申请号 DE19971014602 申请日期 1997.04.09
申请人 CARL ZEISS JENA GMBH, 07745 JENA, DE 发明人 STEINER, REINHARD, DIPL.-PHYS., 07646 STADTRODA, DE;TEICHMANN, SIEGBERT, DIPL.-ING., 07778 DORNDORF-STEUDNITZ, DE
分类号 G01D5/26;G01D5/28;(IPC1-7):G01B11/26;G01B9/02;G01P3/36 主分类号 G01D5/26
代理机构 代理人
主权项
地址