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发明名称
Manufacture of semiconductor chips
摘要
申请公布号
IL125185(A)
申请公布日期
2000.11.21
申请号
IL19980125185
申请日期
1998.07.02
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
分类号
G03F7/20;(IPC1-7):G06F17/50
主分类号
G03F7/20
代理机构
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