发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To increase strength at a pad part being touched by the probe terminal of an inspection equipment. SOLUTION: A second layer probe inspection pad metal 300 for laying a part of probe inspection pad in layer by lowering a first power supply main line 123 while ensuring a sufficient distance L2, and a contact 310 for touching the third and second layers of that probe inspection pad are arranged in an I/O cell 301.
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申请公布号 |
JP2001326260(A) |
申请公布日期 |
2001.11.22 |
申请号 |
JP20000145897 |
申请日期 |
2000.05.18 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
MATSUMOTO SHIGEHIRO;HIROFUJI MASANORI |
分类号 |
G01R31/28;H01L21/3205;H01L21/66;H01L23/52;(IPC1-7):H01L21/66;H01L21/320 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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