发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To increase strength at a pad part being touched by the probe terminal of an inspection equipment. SOLUTION: A second layer probe inspection pad metal 300 for laying a part of probe inspection pad in layer by lowering a first power supply main line 123 while ensuring a sufficient distance L2, and a contact 310 for touching the third and second layers of that probe inspection pad are arranged in an I/O cell 301.
申请公布号 JP2001326260(A) 申请公布日期 2001.11.22
申请号 JP20000145897 申请日期 2000.05.18
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MATSUMOTO SHIGEHIRO;HIROFUJI MASANORI
分类号 G01R31/28;H01L21/3205;H01L21/66;H01L23/52;(IPC1-7):H01L21/66;H01L21/320 主分类号 G01R31/28
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