PROBE HAVING NOISE CONTROL UNIT FOR SEMICONDUCTOR DEVICE TEST AND METHOD FOR CONTROLLING NOISE THEREBY

摘要

PURPOSE: A probe having a noise control unit for a semiconductor device test is provided to improve reliability regarding a wafer level test of the device by controlling the noise generated near a chuck of the probe. CONSTITUTION: A probe for a semiconductor device test having a chuck stage(20) for loading a wafer(40) comprises an insulating noise control unit(30). The noise control unit has a structure for fixedly holding the wafer, and is established in contact with an upper part of the chuck stage and a lower part of the wafer. And, the noise control unit controls an electrical noise signal generated from the chuck stage, so that the electrical noise signal is not induced to the wafer.