| 摘要 |
PURPOSE: A wafer boat is provided to prevent a wafer from being drooped and bent by using a plurality of quartz rods to have a same amount of load to a wafer edge. CONSTITUTION: A wafer boat comprises an upper cover(51), a heat insulating case(56), at least two quartz rods(55) and a wafer drooping prevention unit(53). The heat insulating case is established in a position separated a predetermined interval from the upper cover. The quartz rods have a plurality of wafer slots(55a), connecting the upper cover with the heat insulating case. The wafer drooping prevention unit is established inside the wafer slot to place the wafer stably.
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