| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and an inspection device of a solid-state imaging element capable of efficient inspection by shortening a processing time required for inspection of the solid-state imaging element. SOLUTION: This inspection device 100 of the solid imaging element includes an element driving means 23, an optical condition setting means 25, an operation means 29 for applying image processing to imaged image data, and a determination means for determining a quality of the solid imaging element 21. The operation means 29 has an internal operation part 35 provided inside the inspection device 100, and external operation parts 43A, 43B connected to the inspection device 100 through a communication means 11, and additionally includes a control part 31 for dispersing a load to the external operation parts 43A, 43B when a load state of the internal operation part 35 exceeds a prescribed state range. COPYRIGHT: (C)2007,JPO&INPIT
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