| 摘要 |
<P>PROBLEM TO BE SOLVED: To flexibly support an optional number of semiconductor wafers W on upper and lower sides. <P>SOLUTION: The sheet holding container 11 is used to hold a plurality of semiconductor wafers W for transportation, storage, processing or the like. It is provided with processing trays 12 which are plurally stacked while they are individually holding at least one semiconductor wafer W, and joining mechanisms 18 and 19 which integrally join the processing trays while they are being stacked plurally and which divide them at an optional position. The processing tray 12 is provided with a one-side fixing/holding part 13 on its one side to hold at least one semiconductor wafer W, and anther-side fixing/holding part 14 on another side that is engaged with the one-side fixing/holding part 13 of the other processing tray 12 to be segregated from the external environment and to form a housing space for fixing and holding the sheet. Thus, the necessary number of processing trays 12 according to the number of semiconductor wafers W are stacked, thereby constituting the sheet holding container 11. <P>COPYRIGHT: (C)2007,JPO&INPIT |
