发明名称 PHOTOSENSITIVE COMPOSITIONS AND APPLICATIONS THEREOF
摘要 The present invention relates to photosensitive compositions containing polynorbornene (PNB) polymers and certain additives that are useful for forming microelectronic and/or optoelectronic devices and assemblies thereof, and more specifically to compositions encompassing PNBs and certain hindered phenols as additives which are capable of controlling the adhesiveness by radiation.
申请公布号 US2016223908(A1) 申请公布日期 2016.08.04
申请号 US201615097050 申请日期 2016.04.12
申请人 PROMERUS, LLC ;SUMITOMO BAKELITE CO., LTD 发明人 KNAPP BRIAN;BURNS CHERYL;ELCE EDMUND;SETO KEITARO;SUGIYAMA HIROMICHI;HORII MAKOTO;FUJITA KAZUYOSHI
分类号 G03F7/075;G03F7/20;G03F7/32;H01L21/311;H01L21/027;H01L25/00;H01L23/00;H01L25/065;G03F7/16;G03F7/40 主分类号 G03F7/075
代理机构 代理人
主权项 1. A photosensitive composition capable of controllable adhesiveness after exposure to a radiation, said composition comprising: a) a polymer having a first repeating unit of formula (IA) derived from a monomer of formula (I): wherein: represents a position at which the bonding takes place with another repeat unit;a is an integer from 0 to 3;b is an integer from 1 to 4;c is an integer from 1 to 4;R1 is selected from hydrogen, methyl, ethyl, n-propyl, i-propyl or n-butyl; b) a photo active compound containing a diazo-quinone moiety of formula (A): c) an epoxy compound containing one or more oxirane groups; and d) an additive selected from: a compound of formula (IV): wherein d and e are integers from 1 to 4;f and g are integers from 0 to 4;R2 and R3 are the same or different and independently of each other selected from hydrogen, methyl, ethyl, linear or branched C3-C6alkyl, C3-C8cycloalkyl, C6-C10aryl or C7-C12aralkyl; orR2 and R3 taken together with the carbon atom to which they are attached form a 5 to 8 membered substituted or unsubstituted carbocyclic ring where said substituents are selected from C1-C8alkyl;R4 and R5 are the same or different and independently of each other selected from hydrogen, methyl, ethyl, linear or branched C3-C6alkyl, C3-C8cycloalkyl, C6-C10aryl or C7-C12aralkyl;a compound of formula (V): wherein h is an integer from 1 to 4;i is 1 or 2;R6 independently is hydrogen, methyl, ethyl, linear or branched C3-C16alkyl,C3-C8cycloalkyl, C6-C10aryl or C7-C12aralkyl;a compound of formula (VI): wherein j and k are integers from 1 to 4;l and m are integers from 0 to 4;R7 and R8 are the same or different and independently of each other selected from hydrogen, methyl, ethyl, linear or branched C3-C6alkyl, C3-C8cycloalkyl, C6-C10aryl or C7-C12aralkyl;a compound of formula (VII): wherein n and o are integers from 1 to 4;p and q are integers from 0 to 4;R9, R10, R11 and R12 are the same or different and independently of each other selected from hydrogen, methyl, ethyl, linear or branched C3-C6alkyl; orwhen R13 is —(CH2)r—, one of R9 or R10 and one of R11 or R12 taken together with the carbon atoms to which they are attached form a 5 to 8 membered substituted unsubstituted carbocyclic ring where said substituents are selected from C1-C6alkyl;R13 is —(CH2)r— or phenylene, where r is 1 to 2;R14 and R15 are the same or different and independently of each other selected from hydrogen, methyl, ethyl, linear or branched C3-C6alkyl, C3-C8cycloalkyl, C6-C10aryl or C7-C12aralkyl;a compound of formula (VIII): wherein R16 and R17 are the same or different and independently of each other selected from hydrogen, methyl, ethyl or linear or branched C3-C6alkyl;a compound of formula (IX):or a compound of formula (X):and wherein said composition exhibits decreased adhesiveness after exposing to a radiation.
地址 Brecksville OH US