| 摘要 |
PROBLEM TO BE SOLVED: To provide a cell pattern forming method for arranging cells to form a mask pattern in a shorter time.SOLUTION: The pattern forming method for forming a cell pattern used when designing a mask pattern by using a computer, comprises: acquiring pattern data of a plurality of cells; repeatedly changing a parameter value of an exposing condition when exposing a substrate by lighting a mask having a plurality of cell patterns to project the images of the plurality of cell patterns on the substrate, and parameter values of the plurality of cell patterns; calculating the images of the plurality of cell patterns to determine evaluation values of the images; and determining the parameter values of the plurality of cell patterns. |
