GRAVIMETRIC GAS SENSOR HAVING A LOWERED DETECTION LIMIT

摘要

Gravimetric detector including a nanoelectronic structure comprising: a stationary portion (2); at least one portion (4) that is suspended relative to the stationary portion (2); means (8) for exciting the suspended portion so as to make it vibrate relative to the stationary portion; means (10) for detecting variations in the vibration of said suspended portion; and a porous functionalising layer (6) covering at least some of the suspended portion (4), the porosity of said functionalising layer (6) being comprised between 3% and 50%.