发明名称 TAPE PEELING DEVICE
摘要 PROBLEM TO BE SOLVED: To surely deposit a peeled protective tape by preventing the protective tape from adhering to an inner peripheral surface within a recovery box that a tape peeling device comprises.SOLUTION: In a tape peeling device 1, a recovery box 5 that is provided in the tape peeling device 1 comprises: a sidewall 51 that includes adhered property reduction means on an inner peripheral surface 51a; and air injection means 6 that injects air from the inner peripheral surface 51a to a center of the recovery box 5. A protective tape T1 that is peeled by peel means 4 can be prevented from adhering to the inner peripheral surface 51a of the recovery box 5.SELECTED DRAWING: Figure 1
申请公布号 JP2016201488(A) 申请公布日期 2016.12.01
申请号 JP20150081571 申请日期 2015.04.13
申请人 DISCO ABRASIVE SYST LTD 发明人 HAYASAKA HIDEKI;SUZUKI KUNISHIGE
分类号 H01L21/683;H01L21/304 主分类号 H01L21/683
代理机构 代理人
主权项
地址