A silicon-based high pressure sensor module incorporates a low temperature co-fired ceramic (LTCC) substrate. The LTCC substrate can withstand high pressures. A bossed container filled with oil is mounted on the substrate and houses a sensor cell. The top surface of the bossed container is flexible and deflects under pressure. By controlling the surface area and the thickness of the top surface, the pressure sensor can be configured to measure a wide range of pressures. The oil transfers pressure from the bossed container to the diaphragm of the sensor cell while protecting the sensor cell from high pressures and harsh media.
申请公布号
EP1901050(A2)
申请公布日期
2008.03.19
申请号
EP20070024382
申请日期
2006.04.19
申请人
DELPHI TECHNOLOGIES, INC.
发明人
VAZ, TIMOTHY A.;BETZNER, TIMOTHY M.;LONG, STEPHEN P.