| 摘要 |
PROBLEM TO BE SOLVED: To provide a sulfuric acid waste liquid treating device and a sulfuric acid waste liquid treating method capable of continuously treating sulfuric acid waste liquid containing hydrogen peroxide in an industrial scale.SOLUTION: A sulfuric acid waste liquid treating device includes: a pyrolyzing gas-liquid separating section 1 having a reboiler 12 for heating sulfuric acid waste liquid containing hydrogen peroxide used as washing liquid in a semiconductor manufacturing process, hydrolyzing the hydrogen peroxide contained in the sulfuric acid waste liquid by heating by the reboiler 12, and separating gas containing decomposed gas generated by the hydrolyzation from the sulfuric acid waste liquid; and a distilling section 2 having a reboiler 33 heating the sulfuric acid waste liquid from which the gas is separated in the pyrolyzing gas/liquid separating section 1, and distilling the sulfuric acid waste liquid heated in the reboiler 33 under reduced pressure. The device enables continuous treatment of the sulfuric acid waste liquid containing the hydrogen peroxide for a long time in an industrial scale. |
