System and method to divide fluid flow in a predetermined ratio

摘要

A system and method for dividing the flow of one or more process fluids in a predetermined flow ratio is provided herein. In one embodiment, a system for dividing flow of one or more process fluids in a predetermined flow ratio includes a process chamber having a plurality of inlets for delivering one or more process fluids into the process chamber; a plurality of modulating valves coupled to the plurality of inlets, wherein each inlet of the plurality of inlets is coupled to at least one modulating valve; and a controller coupled to the plurality of modulating valves, the controller configured to control the operation of the plurality of modulating valves to divide the flow of one or more process fluids in the predetermined flow ratio.

主权项

1. A system for dividing flow of a process fluid in a predetermined flow ratio, the system comprising:
a plurality of fluid sources for providing a plurality of process fluids; a plurality of mass flow controllers, wherein each mass flow controller of the plurality of mass flow controllers is coupled to a corresponding fluid source of the plurality of fluid sources; a plurality of sets of modulating valves, wherein each set of modulating valves comprises a plurality of modulating valves, and wherein each set of modulating valves is coupled to a corresponding mass flow controller of the plurality of mass flow controllers; a process chamber having a central region and an outer region and a plurality of inlets for delivering each process fluid of the plurality of process fluids at the predetermined flow ratio between the central region and the outer region, wherein each inlet is coupled to a respective one modulating valve from each set of modulating valves; and a controller coupled to the plurality of sets of modulating valves, the controller configured to control the duty cycle of respective valves in the plurality of sets of modulating valves to divide the flow of each process fluid of the plurality of process fluids in the predetermined flow ratio between the central region and the outer region and to independently control a composition of the plurality of process fluids delivered through each inlet.